I'm going to start with turbo pumps and then add roughing pumps later. I'm going to add some compression ratio numbers which will determine final pressure. Plus prices for pumps and controllers if I can find them.
Adixen ATH31+. 1E11 N2, 1E5 H2 Compression Ratio
Aprox Prices:about $4,700 pump, about $1,700 controller, about $600 required accessories. 4 1/2" CF High Vacuum connection.
Varian Turbo V81M. 5E8 N2, 7E3 H2 Compression Ratio
Aprox Prices $5,900 Pump + Controller. CF 63 High Vacuum connection
Pfeiffer TMU 071YP >1E11 N2, 1E5 H2 Compression Ratio
Aprox Pricesabout $4,700 pump, about $1,200 controller,
Oerlikon Leybold TURBOVAC 50 2E6 N2 Compression Ratio
Aprox Prices:about $3,300 pump, about $1,500 controller. CF 63 High Vacuum connection